“Modulating the Pattern Quality of Micropatterned Multilayer Films Prepapred by Layer-by-Layer Self-Assembly”
Jinhan Cho, Hongseok Jang, Bongjun Yeom, Hosub Kim, Raehyun Kim, Sangcheol Kim, Kookheon Char, and Frank Caruso,
Langmuir, 2006, 22(3), 1356-1364.
DOI: doi.org/10.1021/la052057a
ISSN: 0743-7463
Publication Date (Web): 21 December 2005
Publication Date (Print): 01 January 2006
Supporting Information:
Acknowledgments: This work was supported by the Ministry of Education through the Brain Korea 21 Program at Seoul National University, funded in part by the National Research Laboratory Program (Grant M1-0104-00-0191), and the Australian Research Council (Discovery Project and Federation Fellowship schemes). We are also grateful to R. Johnson (The University of Melbourne) for critical reading of the manuscript, J. Park forTEMmeasurements, U. Seong forSEMmeasurements, and D. Kim for the design of the photomask used in this study.